Introduction

 “Thin Film Transistor and Advanced Display Lab”, located in Shenzhen, is a key laboratory which is approved by the government of Shenzhen City. It is affiliated to Graduate School of Peking University (Shenzhen), at the same time also the active display centre Shenzhen lab of Peking University.  The members of the lab include 10 faculties, dozens of Post Doctorate research associates and graduate students.

The lab has a 500 m^2 clean room, the research facilities in the clean room include etching cleaner machine, centrifuge plasma stripper， plasma cleaning machine, wide band optical source, magnetron sputter/ dual chamber magnetron sputter, Reactive ion etching, PECVD, step tester, ellipsometer, furnace, probe stage, semiconductor test instrument, etc. The lab is being built into a platform for conducting researches in oxide TFT material, device and electrical circuits.

 Our goal is to build a competitive research platform which is industry oriented and open to the worldwide, with the sources in Shenzhen graduate school and the academic advantage of Peking University. The activities here include student education, expertise training and scientific research.

To achieve our goal, the research lab made quite effort of doing education and research work, in the topics that were industry related and on the cutting edge. Progress had been made in a lot of industries. So far, research members in the lab have published more than 100 journal papers and applied for 80+ patent with 30+ granted. Especially, the progress in the field of oxide TFT was well recognized by the international research community, with patents granted both domestically and internationally. Some of the progress has already been used in the product development in industry.