Supercritical Fluids Technique

When a substance's temperature and pressure reach its critical point, it enters a supercritical state known as a supercritical fluid, the fourth phase distinct from liquids and gases. In general, supercritical fluids have almost negligible surface tension like gases, a density comparable to that of liquids, and excellent solubility and permeability, creating the groundwork for the application of supercritical fluids to diverse materials and electronic devices. Our group has utilized the interdisciplinary background to conduct a series of studies on supercritical fluids and electronic devices and materials, successfully repairing the internal defects of various devices such as RRAM, TFT, GaN, HEMT, CNT, etc. (especially effective for devices after preparation) and modifying the properties of materials. Not only is the study topic unique and innovative, but it is also environmentally friendly and sustainable, and there are various technological advances in its use.

Figure 4-1 Schematic diagram of supercritical fluids and its experimental equipment.